An Ultrathin Internal Dielectric Actuator for Extended Range Deflection Pull-in Free Actuation

MEMS electrostatic actuators suffer from pull-in instability, making them highly nonlinear and limiting their useful range of motion. This report resolves the performance-limiting issues gap-closing transducer by using an ultrathin dielectric layer (UDL) for actuation. The device has electromechanical coupling coefficient 4.26% average deflection sensitivity 119 nm/V over a 350 nm upto 3.3 V dc bias. UDL capacitance show square law dependence on voltage. can thus be used as actuator full motion with better performance. Additionally, or gap feedback to maintain constant strain. actuation may also combined lower voltage without changing thickness. [2022-0213]